Get A Practical Guide to Optical Metrology for Thin Films PDF

By Michael Quinten

ISBN-10: 3527411674

ISBN-13: 9783527411672

A one-stop, concise advisor on deciding on and measuring skinny movie thickness via optical methods.

This functional ebook covers the legislation of electromagnetic radiation and interplay of sunshine with topic, in addition to the speculation and perform of thickness size, and sleek purposes. In so doing, it indicates the functions and possibilities of optical thickness decision and discusses the strengths and weaknesses of size units besides their evaluate methods.

Following an creation to the subject, bankruptcy 2 provides the fundamentals of the propagation of sunshine and different electromagnetic radiation in house and subject. the most subject of this e-book, the choice of the thickness of a layer in a layer stack by means of measuring the spectral reflectance or transmittance, is handled within the following 3 chapters. the colour of skinny layers is mentioned in bankruptcy 6. eventually, in bankruptcy 7, the writer discusses a number of commercial functions of the layer thickness size, together with high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, obvious conductive motion pictures, oxides and polymers, skinny movie photovoltaics, and seriously doped silicon.

Aimed at commercial and educational researchers, engineers, builders and brands interested in all components of optical layer and skinny optical movie dimension and metrology, strategy keep an eye on, real-time tracking, and applications.

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A Practical Guide to Optical Metrology for Thin Films by Michael Quinten


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